SEMICONDUCTOR RELAY CIRCUIT, LINEAR MOTOR, STAGE AND ALIGNER

摘要

PROBLEM TO BE SOLVED: To solve the problem in a semiconductor relay circuit comprising a power transistor whose switching off is slow. SOLUTION: The semiconductor relay circuit comprises a first photocoupler for turning on/off power MOSFETs Q1 and Q2 connected to the light receiving side in response to a control signal (H, L) inputted to the light emitting side of a first photocoupler U1, and a resistor for discharging the parasitic capacitance of the power MOSFETs Q1 and Q2 at the time of turn off, wherein a second photocoupler U2 is provided in parallel with the discharge resistor.