| 摘要 |
PROBLEM TO BE SOLVED: To accelerate water drops from moving at the peripheral edge of a substrate to reliably remove the remaining waterdrops from the peripheral edge of the substrate. SOLUTION: Gas is blow on the peripheral edge 5c of a square substrate 5 from a waterdrop scatterer S1, thereby scattering off the waterdrops from the peripheral edge 5c of the substrate 5 due to its gas pressure high enough against the adhesion of the waterdrops remaining on the peripheral edge 5c of the substrate 5.
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