| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a substrate container in which substrates can be managed individually and identification information formed on the surface of the substrate can be read out accurately without opening the cover of the container, and to provide a method for reading out the identification information of the substrate. SOLUTION: The substrate container 10 comprising a container body 11 for containing substrates and having an opening, and a cover 12 for closing the opening such that it can be sealed is further provided with mechanisms 21 and 15 for positioning the substrates 1, means 22 for reading out identification information 3 formed on the substrate, and an external communication means 23. In the method for reading out the identification information, the substrates are located and positioned while turning them in the substrate container, identification information of the substrate is read out by the reading means and then transmitted to the control system of a substrate machining system.</p> |
