| 摘要 |
PROBLEM TO BE SOLVED: To provide a zirconia-type oxygen analyzer by which an oxygen partial pressure in an ultrahigh-purity inert gas is measured without being influenced by a mixed combustible substance. SOLUTION: In the ultratrace oxygen analyzer, a zirconia solid electrolyte plate 1 is arranged inside a gas flow-channel pipe 3, it is heated to a definite temperature by an electric heater 4, a temperature-sensing element 5 and a temperature adjusting circuit 24, a DC voltage is applied to mesh electrodes 2a, 2b with which both faces of the solid electrolyte plate are covered, a current amount at the time when a sample gas is made to flow at a constant flow rate is measured by a current measuring circuit (composed of 22 and 23), and the current amount is converted into a concentration by a signal conversion circuit 25. |
