| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional measurement method capable of precisely specifying a correction part to a design value of a measured object having an uneven surface. SOLUTION: This method is provided with measurement processes S2 and S3 for measuring X-, Y-, and Z-coordinate values of an optional area on the surface of the measured object having a spherical surface, a first computing process S4 for finding the center coordinate of the spherical surface from the measured X-, Y-, and Z- coordinate values by approximate computing, a shifting process S7 for shifting the center of the spherical surface based on the design value from the center coordinate found in the first computing process so that the spherical surface based on the design value of the measured object is positioned so as to be overlapped to the spherical surface as a measurement value of the measured object, a second computing process S8 for computing an finite difference between the spherical surface based on the design value and overlapped by the shifting process and the measurement value of the measured object, a third computing process S9 for computing an overlapping ratio between the spherical surface based on the design value and overlapped by the shifting process and the spherical surface as the measurement value of the measured object, and a display process displaying the computing results obtained in the first, second and third computing processes.
|
