RUTHENIUM FILM AND RUTHENIUM OXIDE FILM, AND METHOD FOR FORMATION THEREOF
摘要
<p>A solution composition for forming a film, characterized in that it comprises a specific ruthenium complex; a method for a ruthenium film or a ruthenium electrode which comprises applying the solution composition on a substrate and subjecting the resultant coating film to a heat treatment in an atmosphere free of oxygen; a method for a ruthenium oxide film or a ruthenium oxide electrode which comprises applying the solution composition on a substrate and subjecting the resultant coating film to a heat treatment in an atmosphere containing oxygen; a ruthenium or ruthenium oxide film formed by the method; and an electrode comprising the ruthenium or ruthenium oxide film. The solution composition allows the formation of a metallic ruthenium or ruthenium oxide film by a simple method comprising application of the composition and burning.</p>
