发明名称 |
Angular velocity measuring apparatus |
摘要 |
An angular velocity measuring apparatus for detecting an angular velocity of a rotation about a rotation axis including a vibration element, a semiconductor integrated circuit chip for processing signals supplied to and from the vibration element and a circuit board on which the semiconductor integrated circuit chip is mounted, and the vibration element is mounted on the semiconductor integrated circuit chip by means of a supporting member including a metal support rod and an adhesive layer. The vibration element and semiconductor integrated circuit chip are arranged to be overlapped with each other viewed in a direction of the rotation axis and are arranged substantially in parallel with each other in planes which are substantially perpendicular to the rotation axis.
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申请公布号 |
US2002046604(A1) |
申请公布日期 |
2002.04.25 |
申请号 |
US20010954713 |
申请日期 |
2001.09.18 |
申请人 |
NGK INSULATORS, LTD. |
发明人 |
ISHIKAWA SEIJI;KIKUCHI TAKAYUKI |
分类号 |
G01C19/56;G01P9/04;H01L41/08;(IPC1-7):G01P3/44 |
主分类号 |
G01C19/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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