发明名称 Angular velocity measuring apparatus
摘要 An angular velocity measuring apparatus for detecting an angular velocity of a rotation about a rotation axis including a vibration element, a semiconductor integrated circuit chip for processing signals supplied to and from the vibration element and a circuit board on which the semiconductor integrated circuit chip is mounted, and the vibration element is mounted on the semiconductor integrated circuit chip by means of a supporting member including a metal support rod and an adhesive layer. The vibration element and semiconductor integrated circuit chip are arranged to be overlapped with each other viewed in a direction of the rotation axis and are arranged substantially in parallel with each other in planes which are substantially perpendicular to the rotation axis.
申请公布号 US2002046604(A1) 申请公布日期 2002.04.25
申请号 US20010954713 申请日期 2001.09.18
申请人 NGK INSULATORS, LTD. 发明人 ISHIKAWA SEIJI;KIKUCHI TAKAYUKI
分类号 G01C19/56;G01P9/04;H01L41/08;(IPC1-7):G01P3/44 主分类号 G01C19/56
代理机构 代理人
主权项
地址