发明名称 METHOD AND DEVICE FOR SHAPE MEASUREMENT, METHOD AND DEVICE FOR EXPOSURE, CONTROL PROGRAM, AND DEVICE MANUFACTURING METHOD
摘要 <p>A shape measuring method, comprising the steps of statistically processing, by a parameter calculating device using a least square method, the position information on shape feature points larger in number than shape parameters specifying the shape of an object measured by a position measuring device so as to calculate the estimated values of the shape parameters such as the center position and radius of a circle (steps 111 and 112), whereby the statistically reasonable estimated values of the shape parameters can be provided even if chipping or projection occurs accidentally at some positions of the shape feature points to be measured or noise is superimposed accidentally on the results of the measurements.</p>
申请公布号 WO2002033352(P1) 申请公布日期 2002.04.25
申请号 JP2001009220 申请日期 2001.10.19
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