Device for gripping and holding substrates or CDs or DVDs positioned on a substrate holder, includes an actuator for moving substrate grippers

摘要

A device for gripping and retaining substrates or CDs or DVDs (2) mounted on a substrate receiving part /plate (14), has a substrate holder (5) and one or more movably arranged substrate grippers (3) which are movable against the action of an adjustment force of a pressure medium or at least one spring (6); at least one actuator for moving the substrate grippers is provided between two vacuum chambers. The actuator comprises of a pressure chamber which effects a shift/movement of the substrate gripper/s (3) with an occurrence of a fluctuation in the pressure.