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发明名称
GESINTERTES SILICIUMNITRID UND VERFAHREN ZU SEINER HERSTELLUNG
摘要
申请公布号
DE69525939(D1)
申请公布日期
2002.04.25
申请号
DE19956025939
申请日期
1995.12.26
申请人
SUMITOMO ELECTRIC INDUSTRIES, LTD.
发明人
NAKAHATA, SEIJI;TAKEUCHI, HISAO;YAMAKAWA, AKIRA
分类号
C04B35/591;(IPC1-7):C04B35/591
主分类号
C04B35/591
代理机构
代理人
主权项
地址
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