发明名称 |
Single mode operation of microelectromechanically tunable, half-symmetric, vertical cavity surface emitting lasers |
摘要 |
A method is provided for fabricating microelectromechanically tunable vertical-cavity surface-emitting lasers with precise lateral and vertical dimensional control. Microelectromechanical tunable vertical cavity surface emitting laser structures are also provided which include a suspended membrane structure made of a dielectric/metal membrane or metal film that supports a cavity-tuning reflective dielectric film stack while being anchored at the perimeter by metal support post(s). Tuning is achieved by translational movement of the cavity-tuning reflective dielectric film stack in a controlled electrostatic field. The current invention deals with the intracavity electrical contacts for current injection for this type of MEM-tunable VCSEL's. The current invention also includes various mechanisms to control the current injection profile so as to ensure single mode operation throughout the tuning range of the MEM-tunable VCSEL's.
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申请公布号 |
US2002048301(A1) |
申请公布日期 |
2002.04.25 |
申请号 |
US20000543318 |
申请日期 |
2000.04.05 |
申请人 |
WANG PEIDONG;TAYEBATI PARVIZ;VAKHSHOORI DARYOOSH |
发明人 |
WANG PEIDONG;TAYEBATI PARVIZ;VAKHSHOORI DARYOOSH |
分类号 |
H01S5/00;H01S5/02;H01S5/10;H01S5/14;H01S5/183;(IPC1-7):H01S5/00;H01S3/08 |
主分类号 |
H01S5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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