发明名称 Adaptive deformable mirror for use as a laser beam guidance component includes a casing assigned with a mirror element able to be reshaped and cooled by a substance.
摘要 An oval mirror element (4) can be cooled by a substance and has a two-part membrane (6.1,6.2), whose membranes are firmly soldered up. Several cooling channels (7.1,7.2) are assigned to the mirror element in an outer and/or inner membrane. The channels connect to a feed and drain-away. One or membranes can be reshaped under pressure mechanically, pneumatically, hydraulically or piezoelectrically.
申请公布号 DE10052249(A1) 申请公布日期 2002.04.25
申请号 DE20001052249 申请日期 2000.10.21
申请人 LT ULTRA-PRECISION-TECHNOLOGY GMBH 发明人 BISCHOF, DIETMAR
分类号 G02B7/18;G02B26/08;(IPC1-7):G02B7/195;G02B5/10;H01S3/034;B23K26/06 主分类号 G02B7/18
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