| 摘要 |
<p>A method is disclosed to form micromolds and micromold components from mixtures of micrometer or nanometer-sized particulates dispersed in an organic binder. Following extraction of the organic binder, the green micromolds or micromold components are sintered to full density, upon which they shrink by accurately predetermined amounts. The method allows to achieve compex-shaped micrometer and nanometer-sized precision parts such as MEMS and MEMS packages.</p> |
