发明名称 POSITION DETECTION METHOD, POSITION DETECTION DEVICE, EXPOSURE METHOD, EXPOSURE SYSTEM, CONTROL PROGRAM, AND DEVICE PRODUCTION METHOD
摘要 A coincidence calculating device calculates, based on observation results of an object obtained by an observation device, an inter-area coincidence allowing for a symmetry between specified areas, for at least one pair of observation results out of observation results in a plurality of respective areas, while moving the plurality of areas having specific mutual positional relations on the observation coordinates system of an object (steps 151-160). A positional information calculating device determines the relation between a moved position and inter-area coincidence on observation coordinates systems in a plurality of areas, and determines, based on that relation, for example, the position of observation coordinates system in a plurality of areas that maximizes, for example, inter-area coincidence to thereby determine the position information of an object (step 161), whereby detecting the position information of an object accurately.
申请公布号 WO0233351(A1) 申请公布日期 2002.04.25
申请号 WO2001JP09219 申请日期 2001.10.19
申请人 NIKON CORPORATION;NAKAJIMA, SHINICHI 发明人 NAKAJIMA, SHINICHI
分类号 G01B11/03;G03F9/00;(IPC1-7):G01B21/00;H01L21/027;G03F7/20 主分类号 G01B11/03
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