发明名称 |
Plasma density information measuring method, probe used for measuring plasma density information, and plasma density information measuring apparatus |
摘要 |
A plasma density information measuring method capable of easily measuring the plasma density information over the long term, a probe for measuring the plasma density information, and a plasma density information measuring apparatus are disclosed. A measuring probe is set such that a tip end of a glass tube of the measuring probe is brought into contact with plasma PM to be measured. High-frequency power sent through a coaxial cable is supplied to the plasma PM from a loop antenna through a wall of the tube, and reflection power of the high-frequency power is received by the loop antenna to obtain a counter frequency variation of reflection coefficient of the high-frequency power. In the obtained reflection coefficient, a portion thereof in which the reflection coefficient is largely reduced is a peak at which strong absorption of high-frequency power is caused due to the plasma density. The plasma density can be obtained from the plasma absorption frequency.
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申请公布号 |
US2002047543(A1) |
申请公布日期 |
2002.04.25 |
申请号 |
US20010972944 |
申请日期 |
2001.10.10 |
申请人 |
NISSIN INC. |
发明人 |
SUGAI HIDEO;TAKASUGA SEIICHI;TOYODA NAOKI |
分类号 |
H01L21/302;C23C14/34;G01N22/00;H01J37/32;H01L21/3065;H05H1/00;H05H1/46;(IPC1-7):H05B31/26 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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