发明名称 |
Method and apparatus for blending process materials |
摘要 |
A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer.
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申请公布号 |
US2002048213(A1) |
申请公布日期 |
2002.04.25 |
申请号 |
US20010919772 |
申请日期 |
2001.07.31 |
申请人 |
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发明人 |
WILMER JEFFREY ALEXANDER;MACKENZIE DANIEL KASE;LULL JOHN MICHAEL;ZADAI ERIC A.;WALKER MICHAEL LOREN |
分类号 |
B01F3/08;B01F5/00;B01F5/04;B01F5/06;B01F15/04;G05D11/13;(IPC1-7):B01F15/02 |
主分类号 |
B01F3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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