| 摘要 |
<p>A gas separation and purification method for efficiently recovering a high added-value gas such as krypton or xenon used as the atmosphere gas of a semiconductor manufacturing apparatus through the PSA process. For a method for separating and purifying the high added-value gas with a mixture gas containing the high added-value gas used as the raw material gas by the pressure-variable adsorption separating method, the balanced type pressure-variable adsorption separating method for separating gas components on the basis of a balanced adsorption difference and the speed type pressure-variable adsorption separating method for separating gas components on the basis of an adsorption speed difference are combined for the use of separating and purifying the high added-value gas.</p> |
