发明名称 Metal layer in semiconductor device and method for fabricating the same
摘要 Metal layer in a semiconductor device and method for fabricating the same, the semiconductor device having a transistor and a capacitor electrode formed on a region of a semiconductor substrate, the metal layer including a planar protection film on an entire surface of the semiconductor substrate inclusive of the transistor and the capacitor electrode, an absorber layer over the planar protection film inclusive of a region over the transistor, an insulating film on an entire surface, with a width of projection in a relievo form in a region over the absorber layer, a via hole through the planar protection film and the insulating layer, to expose a region of the capacitor electrode, a tungsten plug and a planar stuffed layer in the via hole, a mirror metal layer on the insulating film on both sides of the projection of a relievo form of the insulating film, inclusive of the planar stuffed layer, and an insulating film spacer on the projection of a relievo form of the insulating film and the mirror metal layer in the vicinity of the projection, whereby improving a light transmission ratio and enhancing an optical contrast.
申请公布号 US2002048936(A1) 申请公布日期 2002.04.25
申请号 US20010987743 申请日期 2001.11.15
申请人 HYUNDAI ELECTRONICS INDUSTRIES CO., LTD. 发明人 YANG DAE GUN
分类号 H01L21/3205;H01L21/768;(IPC1-7):H01L21/824;H01L21/476;H01L21/44 主分类号 H01L21/3205
代理机构 代理人
主权项
地址