| 摘要 |
PURPOSE: A drier is provided to be capable of satisfactorily drying the entire work while avoiding leaving a jig-contact portion of the work undried. CONSTITUTION: Second nozzles(42a,42b) are provided in the drier, in addition to a first nozzle(41). The second nozzles(42a,42b) are sprayed N2 gases containing an IPA(Isopropyl Alcohol) on a contact part of a semiconductor wafer(31) with a tray(32). A heater(43) heats the IPA-containing N2 gas to bed supplied to first and second nozzles(41,42a,42b).
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