| 摘要 |
PURPOSE: A flexible apparatus for transferring a wafer is provided to extend the lifetime of the flexible apparatus and to improve operating stability, by preventing a timing belt from being separated from a pulley such that the timing belt is installed for flexibility of a driving axis to which a gripper is coupled. CONSTITUTION: The driving axis(130) is installed in a body(100), capable of being flexible in one direction. A coupling member is coupled to an end of the driving axis. A belt extends to one direction and the other direction of the driving direction of the driving axis, coupled to the coupling member. Both side ends of the belt are wound on the pulley to support both sides of the belt. A separation preventing unit is installed in the pulley to prevent the belt wound on the pulley from being separated.
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