APPARATUS FOR TRANSFERRING WAFER

摘要

PURPOSE: An apparatus for transferring a wafer is provided to prevent a wafer and a tweezer from being damaged by a wafer transfer in an abnormal position, by detecting the abnormal position of the wafer while using a vacuum absorption error signal. CONSTITUTION: A drive material(110) is installed on a body, capable of transferring from one side of the body to the other side of the body. A plurality of tweezers(120) are installed in an end of the drive material, protruding to the front of the drive material. A wafer(200) can be absorbed to the upper surface of the tweezers. An isolating unit isolates the wafer from the settle surface of the tweezers when the wafer is settled in a position different from a predetermined settle position, inserted into the tweezers.