Integrated partial sawing process

摘要

A process for partially sawing the streets or grooves (50) on semiconductor wafers (48). After sawing, the streets (50) can be covered by a protective material (52), and then the wafer continues its processing as before. After the wafer (48) is broken, the protective material (52) may or may not be removed. Additionally, the wafer(50) may be broken into individual chips using a wedge piece (70) that has a number of individual wedges (72) on it, where the individual wedges (70) press against the partially sawn streets (50), causing the wafer (48) to break.