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发明名称
A PHOSPHORUS EFFUSION CELL FOR PRODUCING MOLECULAR BEAMS TO BE DEPOSITED ON A SUBSTRATE
摘要
申请公布号
EP1002140(B1)
申请公布日期
2002.04.24
申请号
EP19980905069
申请日期
1998.02.17
申请人
APPLIED EPI, INC.
发明人
COLOMBO, PAUL, E.;PRIDDY, SCOTT
分类号
C23C14/24;C30B23/06;(IPC1-7):C23C14/24
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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