| 摘要 |
A peaking capacitor layout in which a discharge energy is not lowered even when peaking capacitors are decreased in their capacitance, increased in their number and disposed in a plurality of rows. The discharge energy is uniformly distributed to obtain a stable laser power. A peaking capacitor group in a first row formed of a plurality of peaking capacitors and a peaking capacitor group in a second row formed of a plurality of peaking capacitors are disposed in a plurality of rows (two rows) in a direction in which a length of a loop changes. The capacitance of the peaking capacitors forming the second row having a long loop is adjusted to be smaller than that of the peaking capacitors forming the first row having a short loop. And, the capacitance of the peaking capacitors in the first and second rows are adjusted so that the distribution of the capacitance of the peaking capacitors becomes uniform along the longitudinal direction of the discharge electrodes.
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