| 摘要 |
PROBLEM TO BE SOLVED: To provide highly accurate progressiveness of a table without depending on accuracy of machining and setting of a guide. SOLUTION: This machine comprises a straight-driven, table 2, a linear guide 1 for guiding the movement during straight driving of the table 2 along a setting route A, and a magnetic bearing 9 for supporting the table 2 guided to the guide 1 without contacting with the guide 1. The magnetic bearing 9 is in active model having an adjusting characteristic of attitude or vibration for the guide 1 of the table 2, a moving state required of the attitude or vibration of the table 2 in the setting route A is detected from the outside, and the adjusting characteristic of the magnetic bearing 9 is controlled based on data related to the detection to correct the moving state required of the table 2 in the setting route A.
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