PLASMA CORROSION-RESISTANT GLASS MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a plasma corrosion resistant glass member having excellent plasma corrosion resistance, producing no particles and suitable to be used as a jig material for the manufacture of semiconductors. SOLUTION: The part of the member to be exposed to plasma gas consists of a glass material containing one kind of compound as the essential component selected from a group consisting of SiO2-Al2O3-CaO, SiO2-Al2O3-MgO, SiO2-BaO- CaO, SiO2-ZrO2-CaO and SiO2-TiO2-BaO, with the structural ratio of each component controlled to be within the vitrifying range.