发明名称 |
Quartz antenna with hollow conductor |
摘要 |
A radio frequency (RF) antenna for plasma ion sources is formed of a hollow metal conductor tube disposed within a glass tube. The hollow metal tubular conductor has an internal flow channel so that there will be no coolant leakage if the outer glass tube of the antenna breaks. A portion of the RF antenna is formed into a coil; the antenna is used for inductively coupling RF power to a plasma in an ion source chamber. The antenna is made by first inserting the metal tube inside the glass tube, and then forming the glass/metal composite tube into the desired coil shape.
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申请公布号 |
US6376978(B1) |
申请公布日期 |
2002.04.23 |
申请号 |
US20000519139 |
申请日期 |
2000.03.06 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA |
发明人 |
LEUNG KA-NGO;BENABOU ELIE |
分类号 |
H01J37/32;H05H1/46;(IPC1-7):B32B9/00 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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