发明名称 |
Projector and method of manufacturing a light modulation device |
摘要 |
There is provided a method of manufacturing a light modulation device that does not produce scattered reflection comprising: a step of forming a release layer whereby a release layer that produces separation in response to irradiation with incoming light is formed on a heat-resistant substrate having the capability of withstanding heat; a step of forming a piezoelectric layer whereby a piezoelectric layer is formed on the release layer; a patterning step whereby an electrode pattern is formed in respect of the piezoelectric layer and mirror elements are formed at each pixel; a connection step of electrically connecting the active element substrate wherein active elementary elements are provided for each pixel and the piezoelectric layer laminated on the heat-resistant substrate such that the active elements correspond to mirror elements; and an irradiating separation step whereby separation is produced in the release layer by irradiating the release layer with irradiating light from the side of the heat-resistant substrate.
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申请公布号 |
US6375329(B1) |
申请公布日期 |
2002.04.23 |
申请号 |
US19980202133 |
申请日期 |
1998.12.08 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
YOKOYAMA OSAMU;SHIMODA TATSUYA;MIYASHITA SATORU |
分类号 |
G02B26/08;G09F19/22;H04N5/74;(IPC1-7):G03B21/00 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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