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摘要
申请公布号
JP2002512657(A)
申请公布日期
2002.04.23
申请号
JP19980539934
申请日期
1998.05.15
申请人
发明人
分类号
C23C22/34;C23C22/40;C23C22/68;C23C22/83;C23F11/00;(IPC1-7):C23F11/00
主分类号
C23C22/34
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