摘要 |
PROBLEM TO BE SOLVED: To provide a method of producing a silicon nitride filter having high strength and suitable for removing dust or eliminating dust, in which silicon nitride particles are used as a starting material. SOLUTION: The silicon nitride filter is produced by heat treating a formed body under a nitrogen atmosphere, containing 45 to 85% silicon nitride particles having an average particle diameter of 1 to 30 μm, 10 to 50% metal oxide hollow particles and 0.1 to 5% metal oxide solid particles in such a manner that the total amount of the three components is >=90%. |