发明名称 |
Method and device for treating exhaust gas |
摘要 |
A process and an apparatus for treating an exhaust gas, in which a raw gas and high-boiling intermediate products contained in the exhaust gas let out from a CVD system employing a silicon-containing gas is brought into contact with a transition metal such as nickel or a silicide of such transition metals to decompose or convert them into stable halides, followed by detoxication treatment of the harmful components contained in the exhaust gas.
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申请公布号 |
US6375911(B1) |
申请公布日期 |
2002.04.23 |
申请号 |
US19990355937 |
申请日期 |
1999.08.13 |
申请人 |
NIPPON SANSO CORPORATION |
发明人 |
OHMI TADAHIRO;ISHIHARA YOSHIO;MATSUMOTO KOH;KIMIJIMA TETSUYA |
分类号 |
B01D53/86;(IPC1-7):B01D53/86;B01D53/46;B01J23/74 |
主分类号 |
B01D53/86 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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