METHOD AND DEVICE FOR OPTICALLY MONITORING PROCESSES FOR MANUFACTURING MICROSTRUCTURED SURFACES IN THE PRODUCTION OF SEMICONDUCTORS,申请号IL19990143478-传众专利搜索

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发明名称	METHOD AND DEVICE FOR OPTICALLY MONITORING PROCESSES FOR MANUFACTURING MICROSTRUCTURED SURFACES IN THE PRODUCTION OF SEMICONDUCTORS
摘要
申请公布号	IL143478(D0)	申请公布日期	2002.04.21
申请号	IL19990143478	申请日期	1999.12.02
申请人	SEMICONDUCTOR 300 GMBH & CO. KG;FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V.	发明人
分类号	G01R31/302;G01N21/21;G03F7/20;H01L21/66;H01L23/544;(IPC1-7):G01N	主分类号	G01R31/302
代理机构		代理人
主权项
地址

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