METHOD AND APPARATUS FOR IMPROVED SALICIDE RESISTANCE ON POLYSILICON GATES,申请号IL19990143077-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR IMPROVED SALICIDE RESISTANCE ON POLYSILICON GATES
摘要
申请公布号	IL143077(D0)	申请公布日期	2002.04.21
申请号	IL19990143077	申请日期	1999.11.04
申请人	INTEL CORPORATION	发明人
分类号	H01L21/28;H01L21/336;H01L21/8234;H01L29/49;H01L29/78;(IPC1-7):H01L	主分类号	H01L21/28
代理机构		代理人
主权项
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