METHOD FOR DETERMINATION OF OBJECT MICRORELIEF AND OPTICAL PROPERTIES OF PRESURFACE LAYER, MODULATION INTERFERENCE MICROSCOPE FOR REALIZATION OF THE METHOD

摘要

optics, in particular, methods for determination of microrelief. SUBSTANCE: the invention offers the method for determination of the object microrelief and the optical properties of the presurface layer, as well as the modulation interference microscope for realization of this method. EFFECT: enhanced resolution in determination of the relief geometric parameters and distribution of the material optical constants; expanded number of determined constants, including the optical anisotropy constants; considerably enhanced accuracy of determination of the material constants, as well as expanded sphere of investigated objects. 12 cl, 8 dwg