发明名称 METHOD AND APPARATUS FOR MANUFACTURING HEAT INSULATING STAMPER AND HEAT INSULATING STAMPER
摘要 PROBLEM TO BE SOLVED: To provide a method for easily manufacturing a high quality heat insulating stamper at low cost without needing a mechanism and a process needed to improve a mask and film thickness uniformity. SOLUTION: A heat insulating layer made of material having low heat conductivity and high heat resistance is formed by adhering a polyimide sheet 8 closely to a original glass board 1 subjected to first nickel 2a. Prescribed grooves are formed on the original glass board 1. Nickel electroforming is applied to make the heat insulating layer to be prescribed thickness, and the heat insulating layer and all area taken off from the glass original board 1. An inner circumferential part and an outer circumferential part are subsequently struck out by concentric circles with prescribed radiuses to be a sophisticated doughnut-shaped finishing. Thus, a stamper is manufactured.
申请公布号 JP2002117593(A) 申请公布日期 2002.04.19
申请号 JP20000307421 申请日期 2000.10.06
申请人 RICOH CO LTD 发明人 KOBAYASHI SHINJI
分类号 B29C33/38;B29C45/26;G11B7/26;(IPC1-7):G11B7/26 主分类号 B29C33/38
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