发明名称 OPERATION COST CHARGING METHOD FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要 PROBLEM TO BE SOLVED: To provide an operation cost charging method profitable for either of a manufacturer and an equipment maker. SOLUTION: A semiconductor manufacturing device equipment conforming to the specifications given by a customer is lent, and charging is carried out according to the operation amount of the semiconductor manufacturing equipment operated by the customer.
申请公布号 JP2002117336(A) 申请公布日期 2002.04.19
申请号 JP20000306663 申请日期 2000.10.05
申请人 LAM RESEARCH KK 发明人 SAGANE YOICHI
分类号 G06Q50/00;G06F17/40;G06Q30/04;G06Q30/06;G06Q50/04;H01L21/02;H01L21/3065 主分类号 G06Q50/00
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