| 摘要 |
PROBLEM TO BE SOLVED: To provide an UV irradiator which is simplified in structure and enhances irradiation uniformity and the decontamination rate. SOLUTION: The UV irradiator 100 comprises a vacuum chamber 103, having a gas feeder 103a and an evacuator 103b at one side, a light source 107 for radiating UV-rays on the surface of a substrate 105 formed on the topside of the chamber 103, a holder 109 for holding the substrate 105, and a controller. The light source 107 irradiates the substrate surface with UV-rays in the chamber evacuated at a low vacuum of 360 to 1 mTorr.
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