| 摘要 |
PROBLEM TO BE SOLVED: To prevent a spattering phenomenon of electrode from violently occurring inside of a cylinder to generate a hole at an electrode wall. SOLUTION: By installing an inner electrode of a disc shape or bottomed cylindrical shape formed by aluminum or zirconium or their alloy having a smaller work function than that of nickel at a bottom part of a traditional electrode of cylindrical shape, spattering phenomenon of the electrode occurring inside of the electrode of the cylindrical shape is suppressed, and generation of the hole at the electrode wall is prevented.
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