| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device having a stage equipped with a holding mechanism and a grounding mechanism capable of safely and automatically holding, grounding and opening a specimen when replacing the specimen, with respect to a specimen the surface of which is required to be grounded to a grounding potential by a conductor. SOLUTION: The stage is provided with the specimen holding mechanism and the specimen grounding mechanism driven by a vacuum bellows and the like. If a specimen chamber is placed under a vacuum by being moved from a condition under the atmosphere, the specimen is automatically held and grounded, and on the contrary, if the specimen chamber is placed under the atmosphere by being moved from the condition under the vacuum, the specimen is automatically opened. The specimen holding mechanism and the specimen grounding mechanism are integrally molded to make it possible to hold, ground, and open the specimen by one driving force. Thereby, the holding mechanism and the grounding mechanism can be made compact as a whole, and the specimen can be safely and automatically held, grounded and opened.
|
