发明名称 SEMICONDUCTOR DEVICE AND ITS FABRICATING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a high integration semiconductor device in which breakdown strength of a high breakdown strength PMOS transistor is ensured. SOLUTION: The semiconductor device comprises an N type transistor 4 having a first gate 18, an N type lightly doped diffusion layer 36 formed around the first gate, an N type heavily doped diffusion layer 6 formed around the N type lightly doped diffusion layer, and first gate sidewalls 29, 47 and 82 formed around the first gate, and a P type transistor 3 having a second gate 13, a P type lightly doped diffusion layer 35 formed around the second gate, a P type heavily doped diffusion layer 11 formed around the P type lightly doped diffusion layer, and second gate sidewalls 10, 29 and 82 formed around the gate wherein the P type lightly doped diffusion layer extends farther downward of the second gate than the N type lightly doped diffusion layer extending downward of the first gate.
申请公布号 JP2002118177(A) 申请公布日期 2002.04.19
申请号 JP20000310155 申请日期 2000.10.11
申请人 TOSHIBA CORP 发明人 WATABE HIROSHI;NARUGE KIYOMI;MASUDA KAZUNORI
分类号 H01L21/336;H01L21/8234;H01L21/8238;H01L21/8247;H01L27/092;H01L27/10;H01L27/105;H01L27/115;H01L29/78;H01L29/788;H01L29/792;(IPC1-7):H01L21/823;H01L21/824 主分类号 H01L21/336
代理机构 代理人
主权项
地址