| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a stacked piezoelectric actuator which is used for an X-Y stage, a linear motor, a rotating motor, a carrier such as a parts feeder, etc., or the like, and drives it, making use of shearing deformation (mode 15), and its manufacturing method. SOLUTION: A piezoelectric actuator 10 has such construction that piezoelectric substance 12 and electrodes where a plurality of conductors 11 are put side by side at specified intervals roughly in parallel are stacked alternately in thickness direction of the piezoelectric substance 12. The piezoelectric substance 12 is polarized in a direction roughly orthogonal to the thickness direction of itself, and shearing transformation occurs in the piezoelectric substance 12 by applying drive voltage between the electrodes which face each other, catching the piezoelectric substance 12 in stack direction.</p> |
