发明名称 |
METHOD FOR FIXING AND PROCESSING THIN FILM MATERIAL |
摘要 |
PURPOSE: A method for fixing and processing a thin film material is provided to fix the thin film material used for a fabrication process using a conveyer system and process the fixed thin film. CONSTITUTION: A thin film having an adhesive pattern(12) is adhered on a carrier(11). The carrier(11) is formed with a strong material such as an optical fiber, a phenol resin structure, a glass, and a metal plate in order to endure chemical corrosion. The adhesive pattern(12) is strongly adhered on the carrier(11). The adhesive pattern(12) has a resistant characteristic to chemicals. An area of a surface of the carrier(11) is larger than an area of the thin film. The thin film is contacted with an outline portion of the surface of the carrier(11). A photoresist layer is adhered on a thin film. A developing process is performed on the photoresist layer. An edge portion of a printed circuit board(18) is smoothened by performing an etch process.
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申请公布号 |
KR20020029689(A) |
申请公布日期 |
2002.04.19 |
申请号 |
KR20000060291 |
申请日期 |
2000.10.13 |
申请人 |
MORTON INTERNATIONAL, INC. |
发明人 |
CAPENTER RICHARD W. |
分类号 |
H01L21/52;(IPC1-7):H01L21/52 |
主分类号 |
H01L21/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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