| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical element having a tilt and shift mechanism which is light in weight, has simple structure and can displace an optical axis at high speed, and to provide its manufacturing method and an optical device. SOLUTION: The tilt and shift mechanism of a lens 11 is composed of a beam substrate 13 supporting the lens 11 and being a common electrode, and 1st and 2nd electrode substrates 15 and 17 provided with the substrate 13 between. Then, the optical axis 22 of the lens 11 is displaced by locally deforming a beam 12 supporting the lens 11 on the substrate 13 by electrostatic force between the substrates 13 and 15 and electrostatic force between the substrates 13 and 17. |
