PIEZOELECTRIC ACTUATOR, METHOD OF MANUFACTURING PIEZOELECTRIC ACTUATOR, AND ELECTRONIC APPARATUS WITH PIEZOELECTRIC ACTUATOR

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric actuator oscillator excellent in durability, a piezoelectric actuator using its vibrator, and an electronic apparatus fitted with the piezoelectric actuator. SOLUTION: A piezoelectric actuator 1 is equipped with a piezoelectric element 3, a vibrator 2 joined to the piezoelectric element 3, and a mover 5 pressure-welded to the vibrator 2 by pressurizing mechanism 4. The piezoelectric element 3 is provided with an electrode 3a. The vibrator 2 is provided with a contact face 2a to contact with the mover 5. The surface of the vibrator 2 and the contact face 2a is provided with a hard alumite layer 6 covered with hard alumite layer. The surface of the hard alumite layer 6 is covered with a conductive film 7 having conductivity.