| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of approximating distribution of implanted ions, in which an implanted-ion distribution function is provided which can be unequivocally extracted while the extracted result will not be influenced by the subjectivity of the extractor in extracting required parameters, using the implanted-ion distribution function. SOLUTION: This method is based on a model, in which the distribution function similar to a distribution function Na(x) for the main part is partially incorporated inside the distribution function Nc(x) for the channeling tail.
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