| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of specifying a charged particle beam shielding spot. SOLUTION: Current detecting circuits 21, 22, 23, 24, 25 to amplify a beam current corresponding to the amount of a beam detected in each of a movable diaphragm 11 for a focus lens, a movable diaphragm 12 for an objective, a movable diaphragm 13 for an intermediate lens, a movable diaphragm 14 for a projecting lens, and a specimen holder 19, and also to convert it to a voltage are provided. Comparison circuits 26, 27, 28, 29, 30 to output a current only when the voltage from the current detecting circuits 21, 22, 23, 24, 25 exceeds a reference voltage by comparing it with the reference voltage are provided. A panel display device 31 equipped with light emitting diodes 32, 33, 34, 35, 36 provided corresponding to the comparison circuits 26, 27, 28, 29, 30 is provided.
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