| 摘要 |
PURPOSE: A contactless apparatus for measuring the temperature of a semiconductor surface is provided to remarkably reduce the size, by using a semiconductor laser light source having a wavelength similar to the band gap of a white light source without using the white light source. CONSTITUTION: A quantum well is used to irradiate a light source to a semiconductor substrate by using a quantum well intermixing method. A heterogeneous quantum well having different widths is formed to design the light source having a broad wavelength range. A lens condenses the light from the light source. A light detector and a lock-in amplifier detect the light diffusion-scattered at the semiconductor substrate. A computer program calculates a real temperature of the substrate by processing the signal detected from the light detector.
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