| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an X-ray device of a type cooling both a sample and an X-ray detector capable of reducing the running cost saving the electric power and to facilitating the maintenance. SOLUTION: This method for measuring with X-rays includes supplying cold air to the sample S by means of a cooling gas supply device 17, irradiating the sample S with X-rays while cooling a CCD X-ray detector 26, and detecting, using the CCD X-ray detector 26, the X-rays exiting the sample S. A Peltier element 27 is cooled by a heat exchanger 28 by use of the cold air supplied to the sample S and the X-ray detector 26 is cooled by the Peltier element 27 to prevent thermal noises at the X-ray detector 26.</p> |
