| 摘要 |
PROBLEM TO BE SOLVED: To provide a dielectric thin film, which is high in permittivity and capable of optionally selecting temperature dependence of its permittivity over a wide range, a thin film capacitor which is easily decreased in size, reduced in thickness, and lessened in weight and capable of making temperature compensation widely, and to provide a thin film capacitor manufacturing method capable of realizing a very accurate patterning. SOLUTION:α,β-unsaturated acid ester (A) of a specified structure andα,β-unsaturated acid grycidyl ester (B) of specified structure are chemically bonded in a crosslinked structural manner into a crosslinked copolymer, and a dielectric thin film is formed of the crosslinked copolymer as a main component. Or, naphthoquinone diazide is mixed into a copolymer base to obtain a coating fluid, and a pattern is formed through a photolithographic method, by the use of the above coating fluid in place of resist.
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