| 摘要 |
PROBLEM TO BE SOLVED: To provide a lamp annealing apparatus with which variation of the temperature distribution on a wafer, accompanying the variation of the light transparency of a process tube is made small. SOLUTION: A light emitter and a light receiver of a transmission-type sensor are installed on the outside of the process tube, and by monitoring the light transparency of the process tube, the timing of the exchange of the tube can be informed and the lamp power can be controlled by feeding back the monitored result, so as to reduce the variations in the temperature distribution on the wafer.
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